What is the correct sequence of the following step in the fabrication of a monolithic, bipolar junction transistor? 1. Emitter diffusion 2. Base diffusion 3. Buried layer formation 4. Epi–layer formation Select the correct answer using the codes given below (1) 3, 4, 1, 2 (2) 4, 3, 1, 2 (3) 3, 4, 2, 1 (4) 4, 3, 2, 1