Explain the process of oxidation.

Explain the process of oxidation.
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Answer :

The silicon wafers are stacked up in a quartz boat & then inserted into quartz furnace tube. The Si wafers are raised to a high temperature in the range of 950 to 1150oC & at the same time, exposed to a gas containing O2 or H2O or both.The chemical action is Si + 2H2O > Si O2+ 2H2
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